Microelectronics, Microsystems And Nanotechnology: Papers Presented Of At Mmn 2000
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World Scientific Publishing Company
2001
408
978-981-4489-99-7
981-4489-99-9
Annotation
This volume contains papers on the following: CMOS devices and devices based on compound semiconductors; processing; silicon integrated technology and integrated circuit design; quantum physics; nanotechnology; nanodevices, sensors and microsystems. The latest news and future challenges in these fields are presented in invited papers.
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