Micro and Nano Fabrication
Tools and Processes
Price for Eshop: 2098 Kč (€ 83.9)
VAT 0% included
New
E-book delivered electronically online
E-Book information
Annotation
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
Ask question
You can ask us about this book and we'll send an answer to your e-mail.