Cover of Athanasios Dimoulas (EDT), Evgeni Gusev (EDT), Paul C. McIntyre (EDT), Marc Heyns (EDT): Advanced Gate Stacks for High-Mobility Semiconductors

Athanasios Dimoulas (EDT), Evgeni Gusev (EDT), Paul C. McIntyre (EDT), Marc Heyns (EDT) Advanced Gate Stacks for High-Mobility Semiconductors

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Springer Berlin Heidelberg

2008

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978-3-540-71491-0

3-540-71491-X

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This book provides a comprehensive monograph on gate stacks in semiconductor technology. It covers the major latest developments and basics and will be useful as a reference work for researchers, engineers and graduate students alike. The reader will get a clear view of what has been done so far, what is the state-of-the-art and which are the main challenges ahead before we come any closer to a viable Ge and III-V MOS technology.

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