Cover of Chen Lih J. Chen (EDT): Silicide Technology for Integrated Circuits

Chen Lih J. Chen (EDT) Silicide Technology for Integrated Circuits

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The Institution of Engineering and Technology

2011

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978-1-84919-066-4

1-84919-066-6

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Silicide Technology for Integrated Circuits focuses on the task of developing and applying metal silicide technology as it emerges from the scientific to the prototype and manufacturing stages and provides guidance on the application of the latest emerging technology.

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