Cover of Anc Maria J. Anc (EDT), Izumi Katsutoshi Izumi, Hemment Peter L.F. Hemment, Ogura Atsushi Ogura, Hovel Harold J. Hovel, Sadana Devendra K. Sadana: SIMOX

Anc Maria J. Anc (EDT), Izumi Katsutoshi Izumi, Hemment Peter L.F. Hemment, Ogura Atsushi Ogura, Hovel Harold J. Hovel, Sadana Devendra K. Sadana SIMOX

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Publisher: The Institution of Engineering and Technology

Date: 2011

Formats: PDF
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Pages: 159

EAN/ISBN13: 978-1-84919-064-0

ISBN10: 1-84919-064-X

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SIMOX explores Separation-by-IMplanted-OXygen technology, a method of fabricating silicon-on-insulator structures and substrates by implanting high doses of oxygen and high temperature annealing.

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Anc Maria J. Anc (EDT), Izumi Katsutoshi Izumi, Hemment Peter L.F. Hemment, Ogura Atsushi Ogura, Hovel Harold J. Hovel, Sadana Devendra K. Sadana SIMOX

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