Cover of Marc J. Madou: Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology

Marc J. Madou Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology

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CRC Press

2011

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978-1-4398-9534-4

1-4398-9534-1

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Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology focuses on nanotechnology and the science behind it, including solid-state physics. It provides a clear understanding of the electronic, mechanical, and optical properties of solids relied on in integra

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