Tribology In Chemical-Mechanical Planarization
Price for Eshop: 2023 Kč (€ 80.9)
VAT 0% included
New
E-book delivered electronically online
E-Book information
Annotation
The role that friction and contact play in the processes of wear and planarization on material surfaces is central to the understanding of Chemical-Mechanical planarization (CMP) technology, particularly when applied to nanosurfaces. Tribology in Chemical-Mechanical Planarization presents a detailed account of the CMP process in a language that is
Ask question
You can ask us about this book and we'll send an answer to your e-mail.