Cover of Eugene Machlin: Materials Science in Microelectronics II

Eugene Machlin Materials Science in Microelectronics II

The Effects of Structure on Properties in Thin Films

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Elsevier Science

2010

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228

978-0-08-046040-6

0-08-046040-2

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The subject matter of thin-films - which play a key role in microelectronics - divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationships, examining the effect of structure on the following: * Electrical properties* Magnetic properties* Optical properties* Mechanical properties* Mass transport properties* Interface and junction properties* Defects and properties Captures the importance of thin films to microelectronic development Examines the cause / effect relationship of structure on thin film properties

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